EINS

WSI·PSI

WSI measures the height of the soft surface with medium roughness and provides a vertical resolution of 0.5 nm regardless of NA. All magnifications can be used without undermining the vertical resolution.

PSI provides a vertical resolution of 0.1 nm. Thus, when a very low magnification (2.5X) is in use, a large FOV can be achieved by increasing the height resolution.

The data in compliance with the international standard ISO 25178•4287

Provides various data such as roughness, height, width, etc. in a wide range of formats including graphs, excel and 2D•3D images in compliance with the standard set by ISO, the international organization for standardization.

Users can obtain such data according to various parameters such as critical dimensions, step height, peak-to-valley, volume and grade.

Roughness evaluation of images

NanoSystem has over 30 roughness parameters in place, obtained from various international organizations for standardization including ISO, ASME and EUR, which can be used to evaluate roughness of samples.

ISO parameters 4287

Provides 2D measurement analysis data and parameters in compliance with ISO 4287.

Provides a variety of profiles

NanoSystem provides a variety of profiles including distance, height, valley, peak pattern, fractal analysis, texture isotropy and Abbott curve, enabling efficient data management.